
Product Data
Series 2000-U
Ultraclean Computerized Calibration System
The instrument's mass flow controllers are factory calibrated using a primary flow standard traceable to the United States National Institute of Standards and Technology (NIST). The calibration data consists of an eleven-point comparison of commanded versus actual flow with linear interpolation between the points.
*Mass flow controllers are calibrated using a NIST Traceable Primary Flow Standard,Performance
Accuracy From 10 to 100% of Full Scale Flow Concentration: ± 1.0% reading Flow: ± 1.0% reading Repeatability: 0.05%
Warm up time: 30 minutes Leak Specification: 2 x 10(-9) atm. cc/sec. He Operating temperature: 32° - 122° F (0° - 50° C) Performance temperature: 59° - 95° F (15° - 35° C)
Gas inlets
Balance gas: external 1/4" VCR*
Component gases: external 1/4" VCR*
Purge gas: external 1/4" VCR*
Valve Activator external 1/4" Swagelok*
Gas outlet: external 1/4" VCR*
* (or compatible fitting)
Operating Pressures
Minimum: dependent on flow rate
Recommended: 25 psig (1.68 Bar)
Maximum: 100 psig (6.72 Bar)
Wetted Surfaces
Tubing: 10 RA Electropolished 316 Stainless Steel
(Optional - Teflon, Hastelloy, Monel)
MFC's: Stainless Steel (Optional - Hastelloy, Monel)
Seals: 316 Stainless Steel
Solenoids
Nupro Ultra Clean (or equivalent)
Weight
Minimum: 35 lbs. (16 Kg.)
Maximum: 70 lbs. (32 Kg.)
Dimensions (w x h x d)
Portable: 17" x 7" x 23.5"
(43.18 cm x 17.78 cm x 59.69 cm)
Rack: 19" x 7" x 23.5"
(48.26 cm x 17.78 cm x 59.69 cm)
Standard: 115 VAC (100 to 130 VAC), 50/60 Hz Optional: 220 VAC (200 to 260 VAC), 50/60 Hz Current: 3 Amps (maximum)
Inmos T400, 32 bit processor 12 bit A/D and D/A conversion
Front panel membrane keypad Internal timer control RS-232 terminal mode / Remote computer control (optional) Status board interface (optional) Other communications options available
Optional RS-232 serial port / Parallel printer port interface
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