
Product Data
Series 6100
Computerized Multi-Gas Calibration System
The Series 6100 consists of a single chassis supporting 2 thermal mass flow controllers, an ozone generation module, a mixing zone, a reaction chamber for gas phase titration, and control electronics.
Commands are entered from the front panel and displayed on a backlit 4 line by 20 character
liquid crystal display. The instrument may also be remotely operated using contact closures
or the RS-232 serial data interface, both are standard in the Series 6100.
The mass flow controllers are calibrated to a NIST (National Institute of Standards and Technology) traceable primary standard. The calibration data consists of a comparison of desired versus actual flow over the full dynamic range of the instrument with linear interpolation between points. Calibration data is stored in non-volatile memory and may be updated by the user with a suitable standard.
The Series 6100 ozone generator is factory calibrated using a NIST traceable ozone standard. This temperature controlled, ultra-violet (UV) based ozone generator includes a precision photo-optical feedback circuit to compensate for lamp aging effects.
The Series 6100 is available in either a standard rack mount or portable configuration.
Automatic calculation of dilution and span gas flows based on commanded concentration eliminates the need for manual computation and allows rapid transition from point to point.
Internally-stored mass flow controller calibration data improves accuracy by as much as a factor of ten and simplifies field recalibration. Mass flow controllers are factory calibrated at 11 points.
Internally-stored ozone generator calibration data insures linear, repeatable ozone generation without photometer control. Ozone generator performance meets U.S. EPA criteria for ozone transfer standards.
Ozone generator pressure compensation ensures repeatable and stable ozone generation at pressures other than the original calibration pressure.
Full, two-way RS-232 Serial Data Interface (standard) permits remote operation of the instrument including data collection, gas selection, initiation of zero, span and multi-point calibrations.
Accuracy
Concentration: ± 1.0% setpoint
Flow: ± 1.0% setpoint
Flow Repeatability: ± 0.05% F.S.O.
Warm up time: 30 minutes
* Performance specifications are valid when all Mass Flow Controllers are operating
between 10% and 100% of full scale flow.
Ozone Generator Concentration Range: 0.02 - 0.5 ppm at 5 - 10 slpm Optional Ranges: 0.05 - 1.0 ppm at 5 - 10 slpm Accuracy: +/- 2% or +/- 0.003 ppm Repeatability: +/- 2% or +/- 0.003 ppm (for 30 days)
Inlets
Balance: External 1/4" Swagelok*
Span(s): External 1/4" Swagelok*
Outlet
One external 1/4" Swagelok*
*(or compatible fitting)
Operating Pressures at inlets
Minimum: 20 psig (1.38 Bar)
Nominal: 25 psig (1.72 Bar)
Maximum: 30 psig (2.07 Bar)
Wetted Surfaces
Tubing: Teflon®
MFCs: Stainless Steel
Seals: Viton®
Glass Chambers: Pyrex®
Operating temperatures
32° - 122° F (0° - 50° C)
Performance Temperature Range
59° - 95° F (15° - 35° C)
Weight
Standard: 20 lbs.
Including Options: 30 lbs.
Dimensions (w x h x d)
Portable: 17" x 7" x 15"
Rack: 19" x 7" x 15"
Voltage: 100 to 250 VAC, 50/60 Hz
Current: 2 Amps (maximum)
Front panel keypad Internal timer control RS-232 serial data interface I/O control (8 inputs / 8 outputs)
RS-232 serial data interface I/O Control (8 inputs / 8 outputs)
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