Semiconductor manufacturing relies on ultra-high purity of the gases used throughout the process. This includes the gases used in atomic layer deposition as well as high levels of accuracy for residual gas analysis.

Environics systems with ultra-high purity configurations are manufactured with metal seal MFC’s and orbitally welded joints, Ultra High Purity (UHP) configured systems have minimal dead volume and maintain a low leak rate to prevent atmospheric contamination of gas calibration standards. With a >20 year history of designing and manufacturing highly reliable systems with low upkeep, long lifespan, and high repeatability and accuracy.

Systems are configured for the gases that will be used to guarantee the highest level of accuracy in manufacture and in analysis of trace level gases.

S4000 and S3000 gas mixing systems as well as S4040 gas dilution systems can be designed with UHP configuration.

Units are commonly configured with additional options such as pressure regulation or permeation.

Accuracy: Our gas mixing technology is based on very precise control of thermal mass flow controllers. Normally, thermal mass flow controllers offer an accuracy +/- 1% of full-scale flow. However, when combined with Environics computerization and calibration, this accuracy specification is improved to +/- 1% of setpoint. The Full-scale error vs. Setpoint error document shows the 10x improvement in accuracy of a thermal mass flow controller when using Environics controlling technology.

Repeatability:  Our systems have a repeatability of +/-0.05% of full scale.

Traceability:  The instruments' mass flow controllers are factory calibrated using a computer controlled primary flow standard traceable to the United States' National Institute of Standards and Technology (NIST).

Price Savings:  By using pure gases in place of expensive pre-mixed blends, your system will help pay for itself.

Optional Alarms (S3000 only):  An optional visual and/or audible alarm can be installed to alert the operator of specific fault conditions. These alarms can also be emailed to keep you updated even when you are not onsite. This requires the IP address of the email sever have a static IP address.